A TIN OXIDE SEMICONDUCTOR SENSOR FOR OXYGEN DETERMINATION IN THE SUB-PPM RANGE

被引：8

作者：

ALLEGRETTI, F ^{[1
]}

BUTTA, N ^{[1
]}

CINQUEGRANI, L ^{[1
]}

PIZZINI, S ^{[1
]}

机构：

[1] GRP NAZL STRUTTURA MAT,I-20133 MILAN,ITALY

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1993年 / 10卷 / 03期

关键词：

D O I：

10.1016/0925-4005(93)87005-A

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Tin oxide sensors are currently used for the detection of reducing gases in air, although an appropriate use of these sensors could also be the detection of traces of oxygen in inert gas. The present work deals with the results of a systematic investigation on the possibility of using tin oxide sensors for the detection of sub-ppm amounts of oxygen in argon, as required by some applications in microelectronics.

引用

页码：191 / 195

页数：5

共 23 条

[1]

BUTTA N, SENSOR ACTUAT B-CHEM, V2, P151

[2]

BUTTA N, 1990, 7TH P CIMTEC MONT

[3] THE INTERACTION OF TIN OXIDE-FILMS WITH O2, H-2, NO, AND H2S [J].