DIRECT MEASUREMENT OF CONTAMINATION AND ETCHING RATES IN AN ELECTRON-BEAM

[1] CASTAING R, 1962, CR HEBD ACAD SCI, V255, P76

[2] CHADDERTON LT, 1965, RADIATION DAMAGE CRY

[3] DITCHFIELD RW, 1972, THESIS U OXFORD

[4] INELASTIC-SCATTERING OF 80 KEV ELECTRONS IN AMORPHOUS CARBON [J]. PHILOSOPHICAL MAGAZINE, 1975, 31 (01): : 199 - 215

[5] EGERTON RF, 1974, 8 P INT C EL MICR CA, V1, P384

[6] THE ORIGIN OF SPECIMEN CONTAMINATION IN THE ELECTRON MICROSCOPE [J]. BRITISH JOURNAL OF APPLIED PHYSICS, 1953, 4 (APR): : 101 - 106

[7] THE SOURCES OF ELECTRON-INDUCED CONTAMINATION IN KINETIC VACUUM SYSTEMS [J]. BRITISH JOURNAL OF APPLIED PHYSICS, 1954, 5 (JAN): : 27 - 31

[8] HEIDE HG, 1963, Z ANGEW PHYS, V15, P116

[9] HEIDE HG, 1958, 4 P INT C EL MICR, V1, P87

[10] ON THE INVESTIGATION OF SPECIMEN CONTAMINATION IN THE ELECTRON MICROSCOPE [J]. JOURNAL OF APPLIED PHYSICS, 1948, 19 (03) : 226 - 230

[1] CASTAING R, 1962, CR HEBD ACAD SCI, V255, P76

[2] CHADDERTON LT, 1965, RADIATION DAMAGE CRY

[3] DITCHFIELD RW, 1972, THESIS U OXFORD

[4] INELASTIC-SCATTERING OF 80 KEV ELECTRONS IN AMORPHOUS CARBON [J]. PHILOSOPHICAL MAGAZINE, 1975, 31 (01): : 199 - 215

[5] EGERTON RF, 1974, 8 P INT C EL MICR CA, V1, P384

[6] THE ORIGIN OF SPECIMEN CONTAMINATION IN THE ELECTRON MICROSCOPE [J]. BRITISH JOURNAL OF APPLIED PHYSICS, 1953, 4 (APR): : 101 - 106

[7] THE SOURCES OF ELECTRON-INDUCED CONTAMINATION IN KINETIC VACUUM SYSTEMS [J]. BRITISH JOURNAL OF APPLIED PHYSICS, 1954, 5 (JAN): : 27 - 31

[8] HEIDE HG, 1963, Z ANGEW PHYS, V15, P116

[9] HEIDE HG, 1958, 4 P INT C EL MICR, V1, P87

[10] ON THE INVESTIGATION OF SPECIMEN CONTAMINATION IN THE ELECTRON MICROSCOPE [J]. JOURNAL OF APPLIED PHYSICS, 1948, 19 (03) : 226 - 230