THE REFLECTANCE AND COLOR OF TITANIUM NITRIDE

被引：28

作者：

PERRY, AJ

GEORGSON, M

RIBBING, CG

机构：

[1] INST STRAUMANN AG,CH-4437 WALDENBURG,SWITZERLAND

[2] SWISS FED INST TECHNOL,FESTKORPERPHYS LAB,CH-8093 ZURICH,SWITZERLAND

[3] UNIV UPPSALA,DEPT TECHNOL,S-75121 UPPSALA,SWEDEN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 06期

关键词：

D O I：

10.1116/1.573702

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2674 / 2677

页数：4

共 25 条

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[8] PROBLEMS IN THE PHYSICAL VAPOR-DEPOSITION OF TITANIUM NITRIDE [J].

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[9]

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