RF PLANAR MAGNETRON SPUTTERING AND CHARACTERIZATION OF FERROELECTRIC PB(ZR,TI)O3 FILMS

被引：186

作者：

KRUPANIDHI, SB

MAFFEI, N

SAYER, M

ELASSAL, K

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 11期

关键词：

D O I：

10.1063/1.331895

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：6601 / 6609

页数：9

共 39 条

[1] IMPROVEMENT IN PYROELECTRIC INFRARED RADIATION DETECTOR [J].

BEERMAN, HP .

FERROELECTRICS, 1971, 2 (02) :123-&

[2] ION-BEAM DEPOSITION OF THIN-FILMS OF FERROELECTRIC LEAD ZIRCONATE TITANATE (PZT) [J].

CASTELLANO, RN ;

FEINSTEIN, LG .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (06) :4406-4411

[3] ION-BEAM DEPOSITION OF FERROELECTRIC THIN-FILMS SPUTTERED FROM MULTICOMPONENT TARGETS [J].

CASTELLANO, RN .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (02) :629-633

[4] CERAMIC FERROELECTRIC FIELD EFFECT STUDIES [J].

CRAWFORD, JC ;

ENGLISH, FL .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1969, ED16 (06) :525-&

[5] ELECTRICAL-CONDUCTIVITY IN LEAD ZIRCONATE-TITANATE CERAMICS [J].

DIH, JJ ;

FULRATH, RM .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1978, 61 (9-10) :448-451

[6] RESEARCH STATUS AND DEVICE POTENTIAL OF FERROELECTRIC THIN-FILMS [J].

FRANCOMBE, MH .

FERROELECTRICS, 1972, 3 (2-3-) :199-+

[7] ELECTRICAL CONDUCTIVITY IN LEAD TITANATE ZIRCONATE CERAMICS [J].

GERSON, R ;

JAFFE, H .

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1963, 24 (08) :979-&

[8]

GLANG R, 1970, HDB THIN FILM TECHNO, P13

[9]

GOTO Y, 1979, J PHYS SOC JPN, V96, P1580

[10]

Haertling G H, 1964, AM CERAM SOC BULL, V43, P875

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