MONOLITHIC INTEGRATION OF PBSE IR PHOTODIODES ON SI SUBSTRATES FOR NEAR-AMBIENT TEMPERATURE OPERATION

被引:11
作者
COLLOT, P
NGUYENVANDAU, F
MATHET, V
机构
[1] Lab. Central de Recherches, Thomson-CSF, Orsay
关键词
D O I
10.1088/0268-1242/9/5/019
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
PhotovoltaiC IR detectors have been fabricated by a photolithographic process on lead selenide (PbSe) for near ambient temperature operation (200-300 K) in the 3-5 mum spectral band. The PbSe active layer has been grown by molecular beam epitaxy directly on a Si(111) substrate using a CaF2 buffer layer. The bulk, lateral and surface electrical effects which affect sensor performances have been investigated on variable-area diodes. The dark current is dominated by generation-recombination surface currents which are probably due to an inefficient surface passivation. The lateral collection of photocarriers increases the efficiency of the sensor at 300 K, the collection length is around 70 mum and the derived specific detectivity is around 3 x 10(9) cm Hz1/2 W-1.
引用
收藏
页码:1133 / 1137
页数:5
相关论文
共 14 条
[1]   MOLECULAR-BEAM GROWTH OF HOMOEPITAXIAL INSB PHOTOVOLTAIC DETECTORS [J].
ASHLEY, T ;
DEAN, AB ;
ELLIOTT, CT ;
MCCONVILLE, CF ;
WHITEHOUSE, CR .
ELECTRONICS LETTERS, 1988, 24 (20) :1270-1272
[2]  
Briggs R. J., 1980, International Electron Devices Meeting. Technical Digest, P496
[3]   EPITAXIAL PBSE SCHOTTKY-BARRIER DIODES FOR INFRARED DETECTION [J].
HOHNKE, DK ;
HOLLOWAY, H .
APPLIED PHYSICS LETTERS, 1974, 24 (12) :633-635
[4]  
HOLLOWAY H, 1980, PHYS THIN FILMS, P105
[5]   HGCDTE 128X128 INFRARED FOCAL PLANE ARRAYS ON ALTERNATIVE SUBSTRATES OF CDZNTE/GAAS/SI [J].
JOHNSON, SM ;
KALISHER, MH ;
AHLGREN, WL ;
JAMES, JB ;
COCKRUM, CA .
APPLIED PHYSICS LETTERS, 1990, 56 (10) :946-948
[6]   REVIEW OF SEMICONDUCTOR MICROELECTRONIC TEST STRUCTURES WITH APPLICATIONS TO INFRARED DETECTOR MATERIALS AND PROCESSES [J].
KOPANSKI, JJ ;
SCHUSTER, CE .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1993, 8 (06) :888-910
[7]  
MASEK J, 1992, P SOC PHOTO-OPT INS, V1735, P54, DOI 10.1117/12.138640
[8]   A MICROSTRUCTURAL STUDY OF CRYSTALLINE DEFECTS IN PBSE/BAF2/CAF2 ON (111)SI GROWN BY MOLECULAR-BEAM EPITAXY [J].
MATHET, V ;
GALTIER, P ;
NGUYENVANDAU, F ;
PADELETTI, G ;
OLIVIER, J .
JOURNAL OF CRYSTAL GROWTH, 1993, 132 (1-2) :241-249
[9]  
MATHET V, 1993, IN PRESS 8TH P INT C
[10]   VARIABLE-AREA DIODE DATA-ANALYSIS OF SURFACE AND BULK EFFECTS IN MWIR HGCDTE CDTE SAPPHIRE PHOTODETECTORS [J].
MCLEVIGE, WV ;
WILLIAMS, GM ;
DEWAMES, RE ;
BAJAJ, J ;
GERGIS, IS ;
VANDERWYCK, AH ;
BLAZEJEWSKI, ER .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1993, 8 (06) :946-952