HGCDTE 128X128 INFRARED FOCAL PLANE ARRAYS ON ALTERNATIVE SUBSTRATES OF CDZNTE/GAAS/SI

被引:49
作者
JOHNSON, SM
KALISHER, MH
AHLGREN, WL
JAMES, JB
COCKRUM, CA
机构
[1] Santa Barbara Research Center, Goleta, CA 93117
关键词
D O I
10.1063/1.102632
中图分类号
O59 [应用物理学];
学科分类号
摘要
High quality p-on-n heterojunction infrared detectors have been fabricated using controllably doped HgCdTe grown by liquid phase epitaxy on CdZnTe/GaAs/Si alternative substrates grown by metalorganic chemical vapor deposition and used to demonstrate the first 128×128 focal plane array fabricated on these materials. Detectors with a cutoff wavelength of 6.0 μm and a resistance-area product R0 Aj average of 6.0×104 Ω cm2 at 80 K for 16 189 detectors in the array were achieved, and for operating temperatures above approximately 120 K were comparable in performance to detectors co-fabricated on standard lattice-matched bulk CdZnTe substrates. Below 120 K, detector performance was limited by excess generation-recombination current, probably caused by a higher threading dislocation density compared with that for the bulk substrates.
引用
收藏
页码:946 / 948
页数:3
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