METALORGANIC CHEMICAL VAPOR-DEPOSITION GROWTH OF CD1-YZNYTE EPITAXIAL LAYERS ON GAAS AND GAAS/SI SUBSTRATES

被引：37

作者：

AHLGREN, WL ^{[1
]}

JOHNSON, SM ^{[1
]}

SMITH, EJ ^{[1
]}

RUTH, RP ^{[1
]}

JOHNSTON, BC ^{[1
]}

KALISHER, MH ^{[1
]}

COCKRUM, CA ^{[1
]}

JAMES, TW ^{[1
]}

ARNEY, DL ^{[1
]}

ZIEGLER, CK ^{[1
]}

LICK, W ^{[1
]}

机构：

[1] UNIV CALIF SANTA BARBARA,SANTA BARBARA,CA 93117

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 02期

关键词：

D O I：

10.1116/1.576098

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：331 / 337

页数：7

共 17 条

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