PREPARATION OF PB-BI FILM BY ALLOY EVAPORATION .1. FILM COMPOSITION CONTROL

被引:8
作者
HUANG, HCW
GILBERT, BL
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D O I
10.1016/0040-6090(82)90109-2
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T [工业技术];
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08 ;
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页码:201 / 209
页数:9
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共 13 条
[1]   PREPARATION OF ALLOY-FILMS OF CONSTANT COMPOSITION BY DIFFUSION-LIMITED EVAPORATION FROM LIQUID-STATE [J].
AST, DG ;
KRENITSKY, DJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (04) :969-973
[2]  
DARKEN LS, 1953, PHYSICAL CHEM METALS, pCH9
[3]   MASS SPECTROMETRIC DETERMINATION OF ACTIVITIES FOR ALLOYS WITH COMPLEX VAPOR SPECIES - BI-PB AND BI-TL [J].
FRUEHAN, RJ .
METALLURGICAL TRANSACTIONS, 1971, 2 (04) :1213-&
[4]   FABRICATION PROCESS FOR JOSEPHSON INTEGRATED-CIRCUITS [J].
GREINER, JH ;
KIRCHER, CJ ;
KLEPNER, SP ;
LAHIRI, SK ;
WARNECKE, AJ ;
BASAVAIAH, S ;
YEN, ET ;
BAKER, JM ;
BROSIOUS, PR ;
HUANG, HCW ;
MURAKAMI, M ;
AMES, I .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1980, 24 (02) :195-205
[5]  
Hansen M., 1958, J ELECTROCHEM SOC, DOI DOI 10.1149/1.2428700
[6]  
HUIJER P, 1962, PHILIPS TECH REV, V24, P114
[7]  
Hultgren RR, 1973, SELECTED VALUES THER
[8]   LEAD ALLOY JOSEPHSON-JUNCTIONS WITH PB-BI COUNTERELECTRODES [J].
LAHIRI, SK ;
BASAVAIAH, S ;
KIRCHER, CJ .
APPLIED PHYSICS LETTERS, 1980, 36 (04) :334-336
[9]  
MAISSEL LI, 1970, HDB THIN FILM TECHNO, pCH1
[10]   SOLUTIONS IN LIQUID IRON .3. DIFFUSION OF COBALT AND CARBON [J].
MORGAN, DW ;
KITCHENER, JA .
TRANSACTIONS OF THE FARADAY SOCIETY, 1954, 50 (01) :51-60