FAST 2-DIMENSIONAL SELF-CONSISTENT KINETIC MODELING OF LOW-PRESSURE INDUCTIVELY-COUPLED RF DISCHARGES

In this letter a two-dimensional self-consistent model for an inductively coupled RF plasma is presented. The model is based on the spatially resolved determination of the electron distribution function (EDF) via solution of a kinetic equation in the nonlocal approach. The static space charge potential is computed from a 2D fluid model, the RF electric field profile is calculated from the wave equation. The model can easily be treated on usual personal computers with computation times of about one hour. The theoretical results are compared to measurements presented in a previous publication [U. Kortshagen, I. Pukropski, and M. Zethoff, J. Appl. Phys. 76, 2048 (1994)].