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APPLICATIONS OF ION-IMPLANTATION IN METALS

被引：60
作者：
DEARNALEY, G
机构：
来源：
THIN SOLID FILMS | 1983年 / 107卷 / 03期
关键词：
D O I：
10.1016/0040-6090(83)90411-X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：315 / 326
页数：12
相关论文
共 29 条
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