EFFECT OF QUENCHING IMMEDIATELY AFTER SPUTTERING ON SUPERCONDUCTING NBN FILMS

被引：3

作者：

AKUNE, T

SAKAMOTO, N

SHIBUYA, Y

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1984年 / 23卷 / 02期

关键词：

D O I：

10.1143/JJAP.23.184

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：184 / 187

页数：4

共 8 条

[1] NBN FILMS PREPARED BY MAGNETRON SPUTTERING [J].

AKUNE, T ;

SAKAMOTO, N ;

SHIBUYA, Y .

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[2]

AKUNE T, 1983, SHINKU, V26, P657

[3] NITRIDPHASEN DES NIOBS [J].

BRAUER, G ;

ESSELBORN, R .

ZEITSCHRIFT FUR ANORGANISCHE UND ALLGEMEINE CHEMIE, 1961, 309 (3-4) :151-170

[4] SUPERCONDUCTING PROPERTIES OF REACTIVELY SPUTTERED NBCN THIN-FILMS [J].

FRANCAVILLA, TL ;

WOLF, SA ;

SKELTON, EF .

IEEE TRANSACTIONS ON MAGNETICS, 1981, 17 (01) :569-572

[5]

IHARA H, 1982, 1982 P INT CRYOG MAT, P258

[6] REACTIVE SYNTHESIS OF NIOBIUM NITRIDE BY PULSE LASER ANNEALING [J].

NAKAMURA, K ;

HIKITA, M ;

ASANO, H ;

TERADA, A .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1982, 21 (04) :672-673

[7]

SKELTON EF, 1980, J APPL CRYST, V14, P51

[8] STRUCTURE DES NITRURES DE NIOBIUM [J].

TERAO, N .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1965, 4 (05) :353-&

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