REACTIVE SYNTHESIS OF NIOBIUM NITRIDE BY PULSE LASER ANNEALING

被引:20
作者
NAKAMURA, K
HIKITA, M
ASANO, H
TERADA, A
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1982年 / 21卷 / 04期
关键词
D O I
10.1143/JJAP.21.672
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:672 / 673
页数:2
相关论文
共 4 条
[1]   CRYSTAL-STRUCTURE AND LATTICE DISTORTION OF GAMMA-NBNX AND DELTA-NBNX [J].
HEGER, G ;
BAUMGARTNER, O .
JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1980, 13 (32) :5833-5841
[2]  
OHMURA Y, 1980, SHINKU, V23, P359
[3]   SUPERCONDUCTING PROPERTIES, ELECTRICAL RESISTIVITIES, AND STRUCTURE OF NBN THIN-FILMS [J].
SHY, YM ;
TOTH, LE ;
SOMASUND.R .
JOURNAL OF APPLIED PHYSICS, 1973, 44 (12) :5539-5545
[4]   STRUCTURE DES NITRURES DE NIOBIUM [J].
TERAO, N .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1965, 4 (05) :353-&