SUPERCONDUCTING PROPERTIES, ELECTRICAL RESISTIVITIES, AND STRUCTURE OF NBN THIN-FILMS

被引：93

作者：

SHY, YM ^{[1
]}

TOTH, LE ^{[1
]}

SOMASUND.R ^{[1
]}

机构：

[1] UNIV MINNESOTA,DEPT CHEM ENGN & MAT SCI,MINNEAPOLIS,MN 55455

来源：

JOURNAL OF APPLIED PHYSICS | 1973年 / 44卷 / 12期

关键词：

D O I：

10.1063/1.1662193

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5539 / 5545

页数：7

共 31 条

[1] RELATIONSHIP BETWEEN STRUCTURE AND SPUTTERING PARAMETERS IN NBN FILMS [J].

ALESSANDRINI, EI ;

SADAGOPAN, V ;

LAIBOWITZ, RB .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1971, 8 (01) :188-+

[2] SUPERCONDUCTING PROPERTIES OF REACTIVELY SPUTTERED THIN-FILM TERNARY NITRIDES NB-TI-N AND NB-ZR-N [J].

BELL, H ;

SHY, YM ;

ANDERSON, DE ;

TOTH, LE .

JOURNAL OF APPLIED PHYSICS, 1968, 39 (06) :2797-&

[3] PREPARATION STRUCTURE AND PROPERTIES OF SPUTTERED HIGHLY NITRIDED TANTALUM FILMS [J].

COYNE, HJ ;

TAUBER, RN .

JOURNAL OF APPLIED PHYSICS, 1968, 39 (12) :5585-+

[4] HIGH FIELD PROPERTIES OF PURE NIOBIUM NITRIDE THIN FILMS [J].

DEIS, DW ;

GAVALER, JR ;

HULM, JK ;

JONES, CK .

JOURNAL OF APPLIED PHYSICS, 1969, 40 (05) :2153-+

[5] PREPARATION AND SUPERCONDUCTING PROPERTIES OF THIN FILMS OF TRANSITION METAL INTERSTITIAL COMPOUNDS [J].

GAVALER, JR ;

HULM, JK ;

JANOCKO, MA ;

JONES, CK .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1969, 6 (01) :177-&

[6] SUPERCONDUCTING PROPERTIES OF NIOBIUM CARBONITRIDE THIN FILMS [J].

GAVALER, JR ;

JANOCKO, MA ;

JONES, CK .

APPLIED PHYSICS LETTERS, 1971, 19 (08) :305-&

[7] PREPARATION OF THIN-FILMS OF B-1 STRUCTURE SUPERCONDUCTING TERNARY COMPOUNDS [J].

GAVALER, JR ;

JANOCKO, MA ;

JONES, CK .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (01) :17-19

[8] SUPERCONDUCTING PROPERTIES AS A FUNCTION OF THICKNESS IN NBN FILMS [J].

GAVALER, JR ;

JANOCKO, M ;

HULM, JK ;

JONES, CK .

PHYSICA, 1971, 55 (NOCT) :585-&

[9] SUPERCONDUCTING THIN FILMS OF NIOBIUM, TANTALUM, TANTALUM NITRIDE, TANTALUM CARBIDE, AND NIOBIUM NITRIDE [J].

GERSTENBERG, D ;

HALL, PM .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1964, 111 (08) :936-942

[10]

GLANG R, 1967, 3 T INT VAC C 3, V2, P643

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