ELECTROTHERMALLY EXCITED SILICON BEAM MECHANICAL RESONATORS

被引：26

作者：

OTHMAN, MB

BRUNNSCHWEILER, A

机构：

[1] Univ of Southampton, Southampton, Engl, Univ of Southampton, Southampton, Engl

来源：

关键词：

ELECTROTHERMAL EXCITATION - MECHANICAL RESONATORS - MICROMECHANICAL RESONATORS - PIEZORESISTIVE SENSING - POLYSILICON RESISTOR;

D O I：

10.1049/el:19870517

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

(Edited Abstract)

引用

页码：728 / 730

页数：3

共 6 条

[1]

BAYLEY AMW, 1986, CIRCUITRY MICROMECHA

[2]

FRENCH PJ, 1986, THESIS U SOUTHAMPTON

MCSKIMIN, HJ .

[4]

OTHMAN MB, 1986, THESIS U SOUTHAMPTON

[5] SILICON AS A MECHANICAL MATERIAL [J].

PETERSEN, KE .

WILFINGER, RJ ;

BARDELL, PH ;

CHHABRA, DS .