共 23 条
[2]
SURFACE SEGREGATION DURING ALLOY SPUTTERING AND IMPLANTATION
[J].
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH,
1983, 209 (MAY)
:487-494
[4]
BEVOLO AJ, 1991, SURFACE SEGREGATION, P135
[6]
GOTO K, 1978, J VAC SCI TECHNOL, V15, P1695
[10]
LAM NQ, 1987, NUCL INSTRUM METH B, V18, P471