THE EFFECT OF COOLING ON THE DEVELOPMENT OF COMPOSITION PROFILES IN CU-PT ALLOYS UNDER AR+ ION-BOMBARDMENT

被引:7
作者
LI, CF
KUROKAWA, A
ASAHATA, T
SHIMIZU, R
机构
[1] Department of Applied Physics, Faculty of Engineering, Osaka University, Suita, Osaka
关键词
D O I
10.1002/sia.740210109
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The effect of cooling on the development of the altered layer in a Cu-Pt alloy under Ar+ ion bombardment has been studied through the accurate determination of the compositional profiles in the near-surface region by sequential ISS-AES measurements and by a new method. Although the ISS-AES measurements have not revealed any noticeable difference between the composition profiles at about -150 degrees C and room temperature, a significant difference has been observed using the new method based on He+-ISS monitoring of the surface composition under bombardment of mixed (Ar+ + He+) ions, followed by abrupt switching to bombardment with only He+ ions. The measurement procedures are described in detail, and the results obtained by both the techniques are discussed.
引用
收藏
页码:56 / 60
页数:5
相关论文
共 23 条
[1]   MEASUREMENTS OF ANGULAR-DISTRIBUTIONS OF SPUTTERED MATERIAL AS A NEW TOOL FOR SURFACE-SEGREGATION STUDIES - SEGREGATION IN CUPT ALLOYS [J].
ANDERSEN, HH ;
CHERNYSH, V ;
STENUM, B ;
SORENSEN, T ;
WHITLOW, HJ .
SURFACE SCIENCE, 1982, 123 (01) :39-46
[2]   SURFACE SEGREGATION DURING ALLOY SPUTTERING AND IMPLANTATION [J].
ANDERSEN, HH ;
STENUM, B ;
SORENSEN, T ;
WHITLOW, HJ .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY) :487-494
[3]   TRANSIENTS IN THE COMPOSITION OF MATERIAL SPUTTERED FROM ALLOY TARGETS [J].
ANDERSEN, HH ;
STENUM, B ;
SORENSEN, T ;
WHITLOW, HJ .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 2 (1-3) :601-605
[4]  
BEVOLO AJ, 1991, SURFACE SEGREGATION, P135
[5]   SURFACE SEGREGATION IN CU-NI AND CU-PT ALLOYS - COMPARISON OF LOW-ENERGY ION-SCATTERING RESULTS WITH THEORY [J].
BRONGERSMA, HH ;
SPARNAAY, MJ ;
BUCK, TM .
SURFACE SCIENCE, 1978, 71 (03) :657-678
[6]  
GOTO K, 1978, J VAC SCI TECHNOL, V15, P1695
[7]   LOW-ENERGY ION IMPACT PHENOMENA ON SINGLE-CRYSTAL SURFACES [J].
HARRISON, DE ;
KELLY, PW ;
GARRISON, BJ ;
WINOGRAD, N .
SURFACE SCIENCE, 1978, 76 (02) :311-322
[8]   IN-DEPTH SURFACE-COMPOSITION OF AL-MG ALLOY UNDER ION-BOMBARDMENT [J].
KUROKAWA, A ;
SHIMIZU, R .
SURFACE SCIENCE, 1989, 207 (2-3) :460-472
[9]   SURFACE AND SUBSURFACE COMPOSITION CHANGES IN NI-SI ALLOYS DURING ELEVATED-TEMPERATURE SPUTTERING [J].
LAM, NQ ;
HOFF, HA .
SURFACE SCIENCE, 1988, 193 (03) :353-372
[10]  
LAM NQ, 1987, NUCL INSTRUM METH B, V18, P471