ION MILLING PLANARIZATION FOR MAGNETIC-BUBBLE DEVICES

被引：4

作者：

HOU, TW

MOGAB, CJ

WAGNER, RS

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1983年 / 1卷 / 04期

关键词：

D O I：

10.1116/1.572212

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1801 / 1805

页数：5

共 17 条

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