PREPARATION OF YBA2CU3OY SUPERCONDUCTING THIN-FILMS BY RADIOFREQUENCY PLASMA FLASH EVAPORATION

被引：2

作者：

FUKAGAWA, W ^{[1
]}

KOMORI, K ^{[1
]}

FUKUTOMI, M ^{[1
]}

TANAKA, Y ^{[1
]}

ASANO, T ^{[1
]}

MAEDA, H ^{[1
]}

HOSOKAWA, N ^{[1
]}

机构：

[1] ANELVA CORP,TOKYO 183,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1991年 / 30卷 / 06期

关键词：

YBA2CU3OY; SUPERCONDUCTING THIN FILM; HIGH-TEMPERATURE PLASMA; PLASMA FLASH EVAPORATION; ATOMIC OXYGEN;

D O I：

10.1143/JJAP.30.1216

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An attempt has been made to deposit superconducting thin films using low-pressure plasma flash evaporation. The rf plasmas used were sustained at 20-30 Torr by the 13.56 MHz rf generator operated at 10 kW. A dense and lustrous film was obtained at the deposition rate of about 10 angstrom/s. The best film on (100)MgO showed a sharp resistive transition with T(c) (rho = 0) as high as 91 K and the J(c) of 1.3 x 10(4) A/cm2 at 77 K and zero field.

引用

页码：1216 / 1217

页数：2

共 7 条

[1] PREPARATION OF Y-BA-CU-O SUPERCONDUCTING THIN-FILMS BY THE MIST MICROWAVE PLASMA DECOMPOSITION METHOD [J].