RF PLASMA-GENERATED SUPERCONDUCTING Y1BA2CU3O7-X FILMS

Using an inductively coupled rf plasma operated at atmospheric pressure, superconducting thin films of Y1Ba2Cu3O 7-x have been grown in situ on single-crystal yttria-stabilized zirconia [100] from an aerosol precursor. X-ray diffraction and rocking curve results indicate that the films are highly c-axis oriented normal to the substrate with a lattice constant of 11.67-11.68 Å. The full width at half maximum of these films ranges from 0.55°to 1.0°. The films have typical Tc's of 86 K and Jc's in excess of 105 A/cm2 at 77 K and zero field; magnetic measurements reveal an anisotropy of 3:1 at 69 K. The dependence of the processing parameters on the transport properties of the superconducting films is discussed.