BA2Y1CU3O7-Y OXIDATION BY THERMODYNAMIC NONEQUILIBRIUM HIGH-TEMPERATURE (TNH) PLASMA

被引:13
作者
TAKAGI, S [1 ]
SEKIGUCHI, A [1 ]
HOSOKAWA, N [1 ]
TERADA, N [1 ]
JO, M [1 ]
IHARA, H [1 ]
机构
[1] ELECTROTECH LAB,TUKUBASHI,IBARAKI 305,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1989年 / 28卷 / 06期
关键词
D O I
10.1143/JJAP.28.L952
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:L952 / L954
页数:3
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