THE ROLE OF SURFACE PHASES IN PROCESSES ON SILICON SURFACES

被引：15

作者：

LIFSHITS, VG

AKILOV, VB

CHURUSOV, BK

GAVRILJUK, YL

机构：

来源：

SURFACE SCIENCE | 1989年 / 222卷 / 01期

关键词：

D O I：

10.1016/0039-6028(89)90331-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：21 / 30

页数：10

共 26 条

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