APPLICATION OF DIAMOND FILMS FROM CO-H2 PLASMA TO TOOL BLADE COATING

被引:52
作者
SAITO, Y [1 ]
SATO, K [1 ]
MATUDA, S [1 ]
KOINUMA, H [1 ]
机构
[1] TOKYO INST TECHNOL,ENGN MAT RES LAB,MIDORI KU,YOKOHAMA,KANAGAWA 227,JAPAN
关键词
D O I
10.1007/BF01124824
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Diamond films were coated on WC-Co alloy tool blades using a microwave plasma of CO-H2 mixed gas. Diamond film prepared at a CO concentration of 10% had good properties: Vickers hardness almost-equal-to 8500 kg mm-2 and adhesion force almost-equal-to 1.7 kg mm-2. No peel-off of the diamond film was observed after a cutting test of an Al-Si alloy rod at a cutting speed of 450 m min-1 for 0.5 h. It is thought that the high quality of the film originated from the selective etching of cobalt from the tool blade surface by CO-H2 plasma.
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页码:2937 / 2940
页数:4
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