DIAMOND-LIKE CARBON-FILMS PREPARED FROM CH4-H2-H2O MIXED GAS-USING A MICROWAVE PLASMA

被引：27

作者：

SAITO, Y

SATO, K

TANAKA, H

MIYADERA, H

机构：

来源：

JOURNAL OF MATERIALS SCIENCE | 1989年 / 24卷 / 01期

关键词：

D O I：

10.1007/BF00660970

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：293 / 297

页数：5

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