SYNTHESIS OF DIAMOND BY DECOMPOSITION OF METHANE IN MICROWAVE PLASMA

被引：92

作者：

SAITO, Y

MATSUDA, S

NOGITA, S

机构：

[1] Hitachi Ltd, Hitachi, Jpn, Hitachi Ltd, Hitachi, Jpn

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 1986年 / 5卷 / 05期

关键词：

METHANE; -; Decomposition; PLASMAS; Microwaves;

D O I：

10.1007/BF01728692

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In the present investigation, a gas phase decomposition of a mixture containing methane and hydrogen was carried out in microwave plasma. The reaction conditions, such as temperature, pressure and substrate position, for diamond synthesis, were extensively investigated. A schematic illustration of the experimental apparatus is shown.

引用

页码：565 / 568

页数：4

共 4 条

[1] ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON [J].