KINETICS OF PD2SI LAYER GROWTH MEASURED BY AN X-RAY-DIFFRACTION TECHNIQUE

被引：35

作者：

COULMAN, B ^{[1
]}

CHEN, H ^{[1
]}

机构：

[1] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801

来源：

关键词：

D O I：

10.1063/1.336816

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3467 / 3474

页数：8

共 19 条

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[2]

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[3]

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COULMAN, B ;

CHEN, H ;

REHN, LE .

[5]

COULMAN B, 1985, LAYERED STRUCTURES E, V37, P601

[6]

COULMAN B, 1984, THESIS U ILLINOIS UR

[7]

Cullity B.D., 1956, ELEMENTS XRAY DIFFRA, V2nd, P188

[8]

DVORACK M, 1984, THESIS U ILLINOIS UR

[9]

FOLL H, 1981, J APPL PHYS, V52, P5510, DOI 10.1063/1.329533

[10]

GUPTA D, 1985, THIN FILMS RELATIONS, V47, P11