SEMICONDUCTOR SHEET RESISTIVITY MEASUREMENTS ON SQUARE SAMPLES

被引:13
作者
MIRCEA, A
机构
来源
JOURNAL OF SCIENTIFIC INSTRUMENTS | 1964年 / 41卷 / 11期
关键词
D O I
10.1088/0950-7671/41/11/307
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
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页码:679 / &
相关论文
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[3]   THE GEOMETRIC FACTOR IN SEMICONDUCTOR 4-PROBE RESISTIVITY MEASUREMENTS [J].
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