PHOTOLITHOGRAPHY OF AMORPHOUS FILMS OF (ETA(5)-C5H5)2TI(N3)2 ON SILICON(111) RESULTING IN TIO2 - THE MECHANISM OF THE PHOTODEPOSITION REACTION

被引:13
作者
PALMER, BJ
BECALSKA, A
HO, TWH
HILL, RH
机构
[1] Department of Chemistry, Simon Fraser University, Burnaby, V5A 1S6, British Columbia
关键词
D O I
10.1007/BF00365013
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Photolithography to produce TiO2 patterns from amorphous films of (eta5-C5H5)2Ti(N3)2 has been demonstrated. The efficiency of the reaction has been measured yielding a quantum yield of 0.025. The mechanism of the photoreactions of (eta5-C5H5)2Ti(N3)2 has been studied using Fourier transform-infrared spectroscopy in both a low-temperature 1,2-epoxyethylbenzene glass and as surface films. In each case the primary photochemical process was found to be loss of a single azido group. The result of subsequent photolysis was found to be dependent upon medium and temperature. In the low-temperature glass no further photochemistry was observed. The exhaustive photolysis of films at 20 K, or room temperature, under a vacuum or in air led to loss of all ligands and the formation of TiO2.
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页码:6013 / 6020
页数:8
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