THE DEVELOPMENT OF SURFACE-TOPOGRAPHY USING 2-ION BEAMS

被引:11
作者
MAKH, SS
SMITH, R
WALLS, JM
机构
关键词
D O I
10.1007/BF00540797
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:1689 / 1699
页数:11
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