ANALYTICAL MODELING OF SPUTTER INDUCED SURFACE MORPHOLOGY

被引：102

作者：

CARTER, G ^{[1
]}

COLLIGON, JS ^{[1
]}

NOBES, MJ ^{[1
]}

机构：

[1] UNIV SALFORD,DEPT ELECT ENGN,SALFORD M5 4WT,LANCASHIRE,ENGLAND

来源：

RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1977年 / 31卷 / 02期

关键词：

D O I：

10.1080/00337577708234784

中图分类号：

TL [原子能技术]; O571 [原子核物理学];

学科分类号：

0827 ; 082701 ;

摘要：

引用

收藏

页码：65 / 87

页数：23

相关论文

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[2] SECONDARY PROCESSES IN EVOLUTION OF SPUTTER-TOPOGRAPHIES
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[6] INFLUENCE OF SURFACE-DIFFUSION ON TOPOGRAPHY DEVELOPMENT OF AN AMORPHOUS SOLID DURING SPUTTERING
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[J]. JOURNAL OF MATERIALS SCIENCE, 1976, 11 (06) : 1091 - 1098
[7] GROWTH OF TOPOGRAPHY DURING SPUTTERING OF AMORPHOUS SOLIDS .4. GENERALIZED THEORY
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[J]. JOURNAL OF MATERIALS SCIENCE, 1973, 8 (10) : 1473 - 1481
[8] CARTER G, 1976, 8TH P YUG S SUMM SCH
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[10] CARTER G, TO BE PUBLISHED

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