METASTABLE SOLID-SOLUTIONS IN VAPOR-DEPOSITED CU-CR, CU-MO, AND CU-W THIN-FILMS

被引：73

作者：

DIRKS, AG ^{[1
]}

VANDENBROEK, JJ ^{[1
]}

机构：

[1] PHILIPS RES LABS,5600 JA EINDHOVEN,NETHERLANDS

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 06期

关键词：

D O I：

10.1116/1.572799

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2618 / 2622

页数：5

共 11 条

[1] ELEKTRONENBEUGUNGS-AUFNAHMEN VON DUNNEN METALLSCHICHTEN BEI TIEFEN TEMPERATUREN [J].

BUCKEL, W .

ZEITSCHRIFT FUR PHYSIK, 1954, 138 (02) :136-150

[2]

CAHN RW, 1983, PHYSICAL METALLURGY, pCH28

[3] MECHANICAL-PROPERTIES OF THIN ALLOY-FILMS - ULTRAMICROHARDNESS AND INTERNAL-STRESS [J].

DIRKS, AG ;

VANDENBROEK, JJ ;

WIERENGA, PE .

JOURNAL OF APPLIED PHYSICS, 1984, 55 (12) :4248-4256

[4] CONTINUOUS SERIES OF METASTABLE SOLID SOLUTIONS IN SILVER-COPPER ALLOYS [J].

DUWEZ, P ;

WILLENS, RH ;

KLEMENT, W .

JOURNAL OF APPLIED PHYSICS, 1960, 31 (06) :1136-1137

[5] METASTABLE SOLID SOLUTIONS IN THE GALLIUM ANTIMONIDE-GERMANIUM PSEUDOBINARY SYSTEM [J].

DUWEZ, P ;

WILLENS, RH ;

KLEMENT, W .

JOURNAL OF APPLIED PHYSICS, 1960, 31 (08) :1500-1500

[6]

Hansen M., 1958, J ELECTROCHEM SOC, DOI DOI 10.1149/1.2428700

[7]

HILSCH R, 1960, NONCRYSTALLINE SOLID, pCH15

[8]

Hoffman R. W., 1966, PHYS THIN FILMS, VVol. 3, pp. 211

[9]

SCHRODER K, 1978, ELECTRONIC MAGNETIC, P376

[10]

VANDENBROEK JJ, UNPUB THIN SOLID FIL

← 1 2 →