MECHANICAL-PROPERTIES OF THIN ALLOY-FILMS - ULTRAMICROHARDNESS AND INTERNAL-STRESS

被引：32

作者：

DIRKS, AG

VANDENBROEK, JJ

WIERENGA, PE

机构：

来源：

关键词：

D O I：

10.1063/1.333027

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4248 / 4256

页数：9

共 30 条

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SIKORSKI, ME
[J]. WEAR, 1969, 14 (03) : 181 - &
[3] ULTRAMICROHARDNESS TESTER FOR USE IN A SCANNING ELECTRON-MICROSCOPE
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[4] BRENNER A, 1949, NBS RP195442 US DEP, P105
[5] BUNSHAH RF, 1978, VACUUM THIN FILM TEC, P353
[6] Campbell D. S., 1970, HDB THIN FILM TECHNO
[7] COTTRELL AH, 1975, INTRO METALLURGY, P277
[8] ADHESION, INTERNAL-STRESS, MICROSTRUCTURE AND RESISTIVITY OF THIN ALLOY-FILMS OF ALUMINUM, COPPER AND SILVER
DIRKS, AG
VANDENBROEK, JJ
[J]. THIN SOLID FILMS, 1982, 96 (03) : 257 - 263
[9] FOEDERER AF, 1981, PHILIPS TECH REV, V40, P338
[10] Hansen M., 1958, Constitution of Binary Alloys