ON-WAFER MICROWAVE MEASUREMENT SETUP FOR INVESTIGATIONS ON HEMTS AND HIGH-TC SUPERCONDUCTORS AT CRYOGENIC TEMPERATURES DOWN TO 20-K

被引:15
作者
MESCHEDE, H [1 ]
REUTER, R [1 ]
ALBERS, J [1 ]
KRAUS, J [1 ]
PETERS, D [1 ]
BROCKERHOFF, W [1 ]
TEGUDE, FJ [1 ]
BODE, M [1 ]
SCHUBERT, J [1 ]
ZANDER, W [1 ]
机构
[1] FORSCHUNGSZENTRUM JULICH, INST SCHICHT & IONENTECH, W-5170 JULICH 1, GERMANY
关键词
D O I
10.1109/22.179897
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper an on-wafer measurement setup for the microwave characterization of HEMT's and high T(C) superconductors at temperatures down to 20 K is presented. Both S-parameter and noise measurements, can be performed in the frequency range from 45 MHz to 40 GHz and 2 GHz to 18 GHz, respectively, using standard calibration techniques and commercial microwave probe tips. Microwave measurements on a pseudomorphic FET and an AlGaAs/GaAs HEMT as well as investigations on a superconducting filter are presented to demonstrate the efficiency of the developed system.
引用
收藏
页码:2325 / 2331
页数:7
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