ELASTIC PROPERTIES OF THIN-FILM PALLADIUM FOR SURFACE-ACOUSTIC-WAVE (SAW) SENSORS

被引：34

作者：

ANISIMKIN, VI ^{[1
]}

KOTELYANSKII, IM ^{[1
]}

VERARDI, P ^{[1
]}

VERONA, E ^{[1
]}

机构：

[1] CNR,IST ACUST OM CORBINO,ROME,ITALY

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1995年 / 23卷 / 2-3期

关键词：

PALLADIUM THIN FILMS; SAW SENSORS;

D O I：

10.1016/0925-4005(94)01277-O

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The elastic constants and density of supported palladium film have been determined, together with their changes produced by exposure to a gas concentration of 1% H-2 in N-2 at room temperature and atmospheric pressure. The results have been obtained by comparing the experimental group and phase velocities of surface acoustic waves (SAWs) propagating along different substrates covered with the Pd film under test, with the theoretical values calculated using the perturbative approach. Measurements of the phase velocity have been made on the films both before and after exposure to H-2. The data obtained have been compared with those relative to polycrystalline and single-crystal palladium and palladium hydride (PdH0.66).

引用

页码：203 / 208

页数：6

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