EFFECTIVE ELASTIC-CONSTANTS OF THIN-FILM TUNGSTEN-SILICIDE FROM SURFACE ACOUSTIC-WAVE ANALYSIS

被引：11

作者：

CREAN, GM

GOLANSKI, A

OBERLIN, JC

机构：

来源：

APPLIED PHYSICS LETTERS | 1987年 / 50卷 / 02期

关键词：

D O I：

10.1063/1.97823

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：74 / 76

页数：3

共 23 条

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[10] CODEPOSITED SILICIDES IN VERY-LARGE-SCALE INTEGRATION [J].

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