SPATIAL DISTRIBUTIONS OF SPUTTERED PARTICLES UNDER ION-BOMBARDMENT OF POLYCRYSTALS

被引：2

作者：

DODONOV, AI

FEDOROVICH, SD

KRYLOVA, EA

MASHKOVA, ES

MOLCHANOV, VA

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1988年 / 33卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(88)90624-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：534 / 537

页数：4

共 14 条

[1] SPHERICAL ANGULAR-DISTRIBUTION OF ATOMS SPUTTERED WITH ENERGETIC DEUTERIUM AT GRAZING-INCIDENCE [J].

BECERRAACEVEDO, R ;

BOHDANSKY, J ;

ECKSTEIN, W ;

ROTH, J .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 2 (1-3) :631-634

[2]

Behrisch R., 1981, TOP APPL PHYS, V47

[3]

BETZ G, 1987, NUCL INSTR METH B, V18, P321

[4] COMPUTER-SIMULATIONS OF SPUTTERING [J].

BIERSACK, JP .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 27 (01) :21-36

[5] SPUTTERING STUDIES WITH THE MONTE-CARLO PROGRAM TRIM.SP [J].

BIERSACK, JP ;

ECKSTEIN, W .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 34 (02) :73-94

[6]

DODONOV AI, 1986, POVERKHNOST, P33

[7]

Kiriakidis G, 1986, EROSION GROWTH SOLID

[8]

LITTMARK U, 1978, J MATER SCI, V13, P2577, DOI 10.1007/BF02402744

[9]

Mashkova E. S., 1985, Radiation Effects, V89, P313, DOI 10.1080/00337578508222513

[10]

Mashkova E.S., 1985, MEDIUM ENERGY ION RE

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