ELECTRON-ESCAPE DEPTH VARIATION IN THIN SIO2-FILMS MEASURED WITH VARIABLE PHOTON ENERGY

被引:21
作者
HECHT, MH [1 ]
GRUNTHANER, FJ [1 ]
PIANETTA, P [1 ]
JOHANSSON, LI [1 ]
LINDAU, I [1 ]
机构
[1] STANFORD SYNCHROTRON RADIAT LAB,STANFORD,CA 94305
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1984年 / 2卷 / 02期
关键词
D O I
10.1116/1.572450
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:584 / 587
页数:4
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