EPITAXIAL-GROWTH OF W(110) ON AL2O3(11(2)OVER-BAR-O) BY PULSED-LASER DEPOSITION

被引:10
作者
MCGRATH, OFK [1 ]
ROBAUT, F [1 ]
CHERIEF, N [1 ]
LIENARD, A [1 ]
BRUNEL, M [1 ]
GIVORD, D [1 ]
机构
[1] LAB CRISTALLOG GRENOBLE, CNRS, F-38042 GRENOBLE, FRANCE
关键词
D O I
10.1016/0039-6028(94)90124-4
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Epitaxial deposition of W(110) was achieved for the first time by pulsed laser deposition on Al2O3(1120BAR). The growth mode was studied by RHEED. Detailed ex-situ X-ray analysis was performed on films of 20-50 nm thickness. In all samples the W(110) films were found to be unstrained with the W having the bulk lattice parameters. The epitaxy of W(110) is explained in terms of the W atoms sitting in the vacant octahedral sites of the Al2O3(1120BAR). Twinning was observed in some samples.
引用
收藏
页码:L1017 / L1020
页数:4
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