AN ELLIPSOMETER INVESTIGATION OF VAPOR ADSORPTION ON ETCHED SILICON

[1] DETERMINATION OF PROPERTIES OF FILMS ON SILICON BY METHOD OF ELLIPSOMETRY [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1962, 52 (09) : 970 - &

[2] OPTICAL MEASUREMENT OF FILM GROWTH ON SILICON AND GERMANIUM SURFACES IN ROOM AIR [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1957, 104 (10) : 619 - 622

[3] ARCHER RJ, 1963, UNPUB S P

[4] STABILIZATION OF SILICON SURFACES BY THERMALLY GROWN OXIDES [J]. BELL SYSTEM TECHNICAL JOURNAL, 1959, 38 (03): : 749 - 783

[5] BAIRD SS, 1960, AUT M ELECTROCHEMICA

[6] POLARIMETRIC DETERMINATION OF ABSORPTION SPECTRA OF THIN FILMS ON METAL .1. INTERPRETATION OF OPTICAL DATA [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1961, 65 (12) : 2242 - &

[7] BRUNAUER S, 1945, ADSORPTION GASES VAP, V1, P153

[8] CLAUSSEN HB, 1963, J ELECTROCHEM SOC, V110, P983

[9] Drude P, 1889, ANN PHYS CHEM, V272, P532

[10] SIMPLIFIED TREATMENT OF ELLIPSOMETRY [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1958, 48 (01) : 51 - 54

[1] DETERMINATION OF PROPERTIES OF FILMS ON SILICON BY METHOD OF ELLIPSOMETRY [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1962, 52 (09) : 970 - &

[2] OPTICAL MEASUREMENT OF FILM GROWTH ON SILICON AND GERMANIUM SURFACES IN ROOM AIR [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1957, 104 (10) : 619 - 622

[3] ARCHER RJ, 1963, UNPUB S P

[4] STABILIZATION OF SILICON SURFACES BY THERMALLY GROWN OXIDES [J]. BELL SYSTEM TECHNICAL JOURNAL, 1959, 38 (03): : 749 - 783

[5] BAIRD SS, 1960, AUT M ELECTROCHEMICA

[6] POLARIMETRIC DETERMINATION OF ABSORPTION SPECTRA OF THIN FILMS ON METAL .1. INTERPRETATION OF OPTICAL DATA [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1961, 65 (12) : 2242 - &

[7] BRUNAUER S, 1945, ADSORPTION GASES VAP, V1, P153

[8] CLAUSSEN HB, 1963, J ELECTROCHEM SOC, V110, P983

[9] Drude P, 1889, ANN PHYS CHEM, V272, P532

[10] SIMPLIFIED TREATMENT OF ELLIPSOMETRY [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1958, 48 (01) : 51 - 54