MOLECULAR-DYNAMICS SIMULATION OF PREFERENTIAL SPUTTERING FROM ISOTOPIC MIXTURES

被引：23

作者：

LO, DY ^{[1
]}

TOMBRELLO, TA ^{[1
]}

SHAPIRO, MH ^{[1
]}

机构：

[1] CALIF STATE UNIV FULLERTON,DEPT PHYS,FULLERTON,CA 92634

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 40-1卷

关键词：

D O I：

10.1016/0168-583X(89)90976-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：270 / 274

页数：5

共 9 条

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NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 34 (04) :427-438

[2] VELOCITY-DEPENDENT ISOTOPE FRACTIONATION IN SECONDARY-ION EMISSION [J].

GNASER, H ;

HUTCHEON, ID .

PHYSICAL REVIEW B, 1987, 35 (02) :877-879

[3]

LO DY, 1986, NUCL INSTRUM METH B, V17, P107

[4] THE FRACTIONATION OF CA ISOTOPES BY SPUTTERING [J].

RUSSELL, WA ;

PAPANASTASSIOU, DA ;

TOMBRELLO, TA .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 52 (1-2) :41-52

[5] SIMULATION OF ISOTOPIC MASS EFFECTS IN SPUTTERING [J].

SHAPIRO, MH ;

HAFF, PK ;

TOMBRELLO, TA ;

HARRISON, DE .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 12 (01) :137-145

[6]

SHAPIRO MH, 1988, NUCL INSTRUM METH B, V30, P152, DOI 10.1016/0168-583X(88)90111-5

[7]

SHAPIRO MH, 1983, BB1 CALTECH TECHN RE

[8] THEORY OF SPUTTERING .I. SPUTTERING YIELD OF AMORPHOUS AND POLYCRYSTALLINE TARGETS [J].

SIGMUND, P .

PHYSICAL REVIEW, 1969, 184 (02) :383-+

[9]

SIGMUND P, 1987, NUCL INSTRUM METH B, V18, P375

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