SIMULATION OF ISOTOPIC MASS EFFECTS IN SPUTTERING

被引：52

作者：

SHAPIRO, MH

HAFF, PK

TOMBRELLO, TA

HARRISON, DE

机构：

[1] CALTECH,DEPT PHYS,PASADENA,CA 91125

[2] USN,POSTGRAD SCH,DEPT PHYS,MONTEREY,CA 93940

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 12卷 / 01期

关键词：

D O I：

10.1016/0168-583X(85)90709-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：137 / 145

页数：9

共 11 条

[1]

Betz G., 1983, SPUTTERING PARTICLE, P11

[2] SPUTTERING MODELS - A SYNOPTIC VIEW [J].

HARRISON, DE .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1983, 70 (1-4) :1-64

[3]

HARRISON DE, 1980, P S SPUTTERING, P41

[4]

KELLY PW, 1977, THESIS US NAVAL POST

[5]

OLSON RR, 1979, J APPL PHYS, V50, P367

[6] THE FRACTIONATION OF CA ISOTOPES BY SPUTTERING [J].

RUSSELL, WA ;

PAPANASTASSIOU, DA ;

TOMBRELLO, TA .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 52 (1-2) :41-52

[7] SPUTTERING OF MULTICOMPONENT MATERIALS - ELEMENTS OF A THEORY [J].

SIGMUND, P ;

OLIVA, A ;

FALCONE, G .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 194 (1-3) :541-548

[8]

SIGMUND P, 1981, SPUTTERING PARTICLE, V1, P9

[9] MASS FRACTIONATION OF LUNAR-SURFACE BY SOLAR-WIND SPUTTERING [J].

SWITKOWSKI, ZE ;

HAFF, PK ;

TOMBRELLO, TA ;

BURNETT, DS .

JOURNAL OF GEOPHYSICAL RESEARCH, 1977, 82 (26) :3797-3804

[10] SPUTTER-INDUCED ISOTOPIC FRACTIONATION AT SOLID-SURFACES [J].

WATSON, CC ;

HAFF, PK .

JOURNAL OF APPLIED PHYSICS, 1980, 51 (01) :691-699

← 1 2 →