AUTOMATIC ELLIPSOMETER WITH HIGH SENSITIVITY AND SPECIAL ADVANTAGES FOR INFRARED SPECTROSCOPY OF ADSORBED SPECIES

被引:45
作者
STOBIE, RW [1 ]
RAO, B [1 ]
DIGNAM, MJ [1 ]
机构
[1] UNIV TORONTO,CHEM DEPT,TORONTO M5S 1A1,ONTARIO,CANADA
来源
APPLIED OPTICS | 1975年 / 14卷 / 04期
关键词
D O I
10.1364/AO.14.000999
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
收藏
页码:999 / 1003
页数:5
相关论文
共 6 条
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DIGNAM, MJ ;
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[2]   AZIMUTHAL MISALIGNMENT AND SURFACE ANISOTROPY AS SOURCES OF ERROR IN ELLIPSOMETRY [J].
DIGNAM, MJ ;
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[3]   THE EFFECT OF SURFACE COVERAGE ON THE SPECTRA OF CHEMISORBED CO [J].
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[4]   A COMPUTER-OPERATED FOLLOWING ELLIPSOMETER [J].
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[5]   DESIGN AND OPERATION OF AN AUTOMATED, HIGH-TEMPERATURE ELLIPSOMETER [J].
VANDERME.YJ ;
HIEN, NC .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 64 (06) :804-811
[6]  
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