3-DIMENSIONAL RBS ON THE FAURE NUCLEAR MICROPROBE

A nuclear microprobe has recently been commissioned at the Van de Graaff group of the National Accelerator Centre (NAC) at Faure, South Africa. The data acquisition system has been developed and adapted locally to meet specific local requirements, and is well suited to the application of three dimensional RBS. Due to the design of the software, a specimen can be efficiently analyzed in a minimum of beam time, thus optimizing facility utilization and minimizing beam damage. This paper will describe the application of the data acquisition system to three dimensional RBS, and the implementation of the technique will be illustrated with reference to a silicon integrated circuit.