SPUTTERING OF AL2O3 AND LINBO3 IN THE ELECTRONIC STOPPING REGION

被引:22
作者
QIU, YX [1 ]
GRIFFITH, JE [1 ]
TOMBRELLO, TA [1 ]
机构
[1] CALTECH,WK KELLOGG RADIAT LAB,PASADENA,CA 91125
来源
RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1982年 / 64卷 / 1-4期
关键词
D O I
10.1080/00337578208223000
中图分类号
TL [原子能技术]; O571 [原子核物理学];
学科分类号
0827 ; 082701 ;
摘要
引用
收藏
页码:111 / 116
页数:6
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