SOFT-X-RAY REFLECTOMETRY APPLIED TO THE EVALUATION OF SURFACE-ROUGHNESS VARIATION DURING THE DEPOSITION OF THIN-FILMS

[1] Beckmann P., 1963, SCATTERING ELECTROMA, P80

[2] Berning PH, 1963, PHYS THIN FILMS, V1, P69

[3] BLAKELY JM, 1963, PROGR MATER SCI, V10, P395

[4] EPITAXIAL-GROWTH OF SI ON GAP(100) AND SI(111), MONITORED BY SOFT-X-RAY REFLECTION [J]. SURFACE SCIENCE, 1985, 154 (2-3) : 601 - 613

[5] OPTIMIZATION OF MULTILAYER SOFT-X-RAY MIRRORS [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1984, 219 (03) : 603 - 606

[6] Chauvineau J. P., 1985, Proceedings of the SPIE - The International Society for Optical Engineering, V563, P275

[7] Chauvineau J. P., 1985, Proceedings of the SPIE - The International Society for Optical Engineering, V563, P245

[8] CHOPRA KL, 1969, THIN FILM PHENOMENA, P185

[9] Croce P., 1981, Acta Electronica, V24, P247

[10] COMMENT ON 2 PECULIAR CASES IN REFLECTION AND SCATTERING OF LIGHT FROM A ROUGH INTERFACE [J]. JOURNAL OF OPTICS-NOUVELLE REVUE D OPTIQUE, 1979, 10 (01): : 37 - 40

[1] Beckmann P., 1963, SCATTERING ELECTROMA, P80

[2] Berning PH, 1963, PHYS THIN FILMS, V1, P69

[3] BLAKELY JM, 1963, PROGR MATER SCI, V10, P395

[4] EPITAXIAL-GROWTH OF SI ON GAP(100) AND SI(111), MONITORED BY SOFT-X-RAY REFLECTION [J]. SURFACE SCIENCE, 1985, 154 (2-3) : 601 - 613

[5] OPTIMIZATION OF MULTILAYER SOFT-X-RAY MIRRORS [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1984, 219 (03) : 603 - 606

[6] Chauvineau J. P., 1985, Proceedings of the SPIE - The International Society for Optical Engineering, V563, P275

[7] Chauvineau J. P., 1985, Proceedings of the SPIE - The International Society for Optical Engineering, V563, P245

[8] CHOPRA KL, 1969, THIN FILM PHENOMENA, P185

[9] Croce P., 1981, Acta Electronica, V24, P247

[10] COMMENT ON 2 PECULIAR CASES IN REFLECTION AND SCATTERING OF LIGHT FROM A ROUGH INTERFACE [J]. JOURNAL OF OPTICS-NOUVELLE REVUE D OPTIQUE, 1979, 10 (01): : 37 - 40