NOVEL ABLATION OF FUSED QUARTZ BY PREIRRADIATION OF VACUUM-ULTRAVIOLET LASER-BEAMS FOLLOWED BY 4TH HARMONICS IRRADIATION OF ND-YAG LASER

被引：47

作者：

SUGIOKA, K ^{[1
]}

WADA, S ^{[1
]}

TASHIRO, H ^{[1
]}

TOYODA, K ^{[1
]}

NAKAMURA, A ^{[1
]}

机构：

[1] SCI UNIV TOKYO,SHINJUKU KU,TOKYO 162,JAPAN

来源：

APPLIED PHYSICS LETTERS | 1994年 / 65卷 / 12期

关键词：

D O I：

10.1063/1.112027

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Preirradiation using vacuum-ultraviolet (VUV) beams of anti-Stokes stimulated Raman scattering VUV laser, followed by the fundamental beam (266 nm) irradiation, provides a novel scheme for fused quartz ablation. The preirradiation of 5th- (171 nm) or 6th- (160 nm) order anti-Stokes beams realizes significant ablation with the succeeding fundamental beam irradiation of a laser fluence less than the ablation threshold. X-ray photoelectron spectroscopy analysis reveals that SiO(x)(x < 2) is created in the fused quartz by photolysis using the anti-Stokes beams. Each effect of the preirradiation and the succeeding fundamental beam irradiation in the ablation process is discussed.

引用

页码：1510 / 1512

页数：3

共 8 条

[1] MASKLESS WRITING OF SUBMICROMETER GRATINGS IN FUSED-SILICA BY FOCUSED ION-BEAM IMPLANTATION AND DIFFERENTIAL WET ETCHING [J].