APPLICATION OF SYNCHROTRON RADIATION TO X-RAY LITHOGRAPHY

被引：61

作者：

SPILLER, E ^{[1
]}

EASTMAN, DE ^{[1
]}

FEDER, R ^{[1
]}

GROBMAN, WD ^{[1
]}

GUDAT, W ^{[1
]}

TOPALIAN, J ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

关键词：

D O I：

10.1063/1.322577

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5450 / 5459

页数：10

共 14 条

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HATZAKIS, M
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