X-RAY-IRRADIATION EFFECTS ON A MICROWAVE-PLASMA CHEMICAL VAPOR-DEPOSITION DIAMOND MEMBRANE

被引：16

作者：

SUZUKI, K

KUMAR, R

WINDISCHMANN, H

SANO, H

IIMURA, Y

MIYASHITA, H

WATANABE, N

机构：

[1] BP AMER INC,WARRENSVILLE RES CTR,CLEVELAND,OH 44128

[2] DAI NIPPON PRINTING CO LTD,MICRO PROD RES LAB,SAITAMA 356,JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1991年 / 9卷 / 06期

关键词：

D O I：

10.1116/1.585301

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Diamond membrane masks, fabricated using microwave-plasma chemical vapor deposition, have been evaluated for their dimensional stability as well as other principal characteristics, during 15-MJ/cm3 x-ray irradiation within a vacuum. After x-ray irradiation, intensity of the diamond Raman band at 1332 cm-1 increased to 150% of that unirradiated membrane. Spin density in the diamond increased up to 1.5 x 10(19) spins/g; two times higher than that before irradiation. Despite these effects, in-plane distortion due to x-ray irradiation of the diamond membrane on a half-area of 25-mm square was extremely small (< 0.08-mu-m). Optical transparency of the membrane increased by 4.5%-6.1% at 633 nm due to x-ray irradiation.

引用

页码：3266 / 3269

页数：4

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