RADIATION-DAMAGE EFFECTS IN BORON-NITRIDE MASK MEMBRANES SUBJECTED TO X-RAY-EXPOSURES

被引：38

作者：

JOHNSON, WA ^{[1
]}

LEVY, RA ^{[1
]}

RESNICK, DJ ^{[1
]}

SAUNDERS, TE ^{[1
]}

YANOF, AW ^{[1
]}

BETZ, H ^{[1
]}

HUBER, H ^{[1
]}

OERTEL, H ^{[1
]}

机构：

[1] FRAUNHOFER INST MIKROSTRUKT TECH,D-1000 BERLIN 33,FED REP GER

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 01期

关键词：

D O I：

10.1116/1.583878

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：257 / 261

页数：5

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