MIXTURES OF POLY (2,3-DICHLORO-1-PROPYL ACRYLATE) AND POLY (GLYCIDYL METHACRYLATE-CO-ETHYL ACRYLATE) AS AN X-RAY RESIST WITH IMPROVED ADHESION

被引：19

作者：

MORAN, JM

TAYLOR, GN

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 06期

关键词：

D O I：

10.1116/1.570332

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2014 / 2019

页数：6

共 12 条

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[4] KWEI TK, UNPUBLISHED
[5] HIGH-SPEED REPLICATION OF SUBMICRON FEATURES ON LARGE AREAS BY X-RAY LITHOGRAPHY
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[7] IMPROVED RESOLUTION FOR DCOPA NEGATIVE X-RAY RESIST BY EXPOSURE UNDER A CONTROLLED-ATMOSPHERE OF NITROGEN AND OXYGEN
MORAN, JM
TAYLOR, GN
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06): : 2020 - 2024
[8] MORAN JM, 1977, 14TH P S EL ION BEAM
[9] MORAN JM, UNPUBLISHED
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