MICRO-MATERIALS PROCESSING

被引:9
作者
COHEN, MG
KAPLAN, RA
ARTHURS, EG
机构
关键词
D O I
10.1109/PROC.1982.12353
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
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页码:545 / 555
页数:11
相关论文
共 33 条
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