FIELD-INDUCED NANOMETER-SCALE TO ATOMIC-SCALE MANIPULATION OF SILICON SURFACES WITH THE STM

被引:530
作者
LYO, IW
AVOURIS, P
机构
[1] IBM Research Division, T. J. Watson Research Center, Yorktown Heights
关键词
D O I
10.1126/science.253.5016.173
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
The controlled manipulation of silicon at the nanometer scale will facilitate the fabrication of new types of electronic devices. The scanning tunneling microscope (STM) can be used to manipulate strongly bound silicon atoms or clusters at room temperature. Specifically, by using a combination of electrostatic and chemical forces, surface atoms can be removed and deposited on the STM tip. The tip can then move to a predetermined surface site, and the atom or cluster can be redeposited. The magnitude of such forces and the amount of material removed can be controlled by applying voltage pulses at different tip-surface separations.
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页码:173 / 176
页数:4
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